Temperature Rise of Metal Workpiece in Ion Beam Sputter Processing
نویسندگان
چکیده
منابع مشابه
Effect of Gas Ratio on Tribological and Corrosion Properties of Ion Beam Sputter Deposited TiN Coatings
Titanium nitride thin films were grown on 304 stainless steel substrates at various nitrogen/argon flow ratios by ion beam sputtering (IBS) technique. The current research is a follow up study on the influence of gas ratio on structural and corrosion properties in the TiN coated 304 stainless steel. Film structural identification of phases was performed using X-ray diffractometry (XRD). Sca...
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ژورنال
عنوان ژورنال: Journal of the Japan Society of Precision Engineering
سال: 1979
ISSN: 0374-3543
DOI: 10.2493/jjspe1933.45.962